Lehrstuhl für Fertigungstechnologie, Universität Erlangen-Nürnberg

Excimer Laser Microstructuring under Water for the Production of Microparts

Project Status: finished


Advancing miniaturization leads to continuously increasing demands on the processing quality which must be met by the manufacturing processes used for production. Laser radiation proven to be a tool well-suited for microsystems technology. When very small structures are created, however, problems may occur in the form of a redeposition of materials or formation of a strong melting phase, which must be considered working with ceramic and metal component. Extensive research has shown that these negative phenomena can be avoided almost completely by spraying a thin water film when using excimer laser processing. The liquid is sprayed on during irradiation in order to replace vaporized portions. With both ceramic and steel materials it can be observed that besides reducing the ablation rate because of heat drain into the liquid, this method clearly influences the form of the surface developing at the bottom of the structure. The micro cavities resulting from this mechanism greatly expand the possible applications of excimer laser microstructuring under a liquid film.

Letztes Update: 01.01.2010